in Modeling Aspects in Optical Metrology in PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE), ISSN: 0277-786X
Volume: 6617, Pages: A6170-A6170 (10)
Conference
Conference on Modeling Aspects in Optical Metrology, Date: JUN 18-19, 2007, Location: Munich, GERMANY, Sponsors: SPIE Europe, European Opt Soc, Wissensch Gesell Lasertech e V