Thin Film Silicon Mems Microresonators Fabricated by Hot-Wire Chemical Vapor Deposition

AuthID
 P-004-FV5
4
Author(s)
·
Document Type
Article
Year published
2006
Published
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 16, Issue: 12, Pages: 2730-2735 (6)
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Publication Identifiers
Scopus: 2-s2.0-33846047872
Wos: WOS:000242475200028
Source Identifiers
ISSN: 0960-1317
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