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Thin Film Silicon Mems Microresonators Fabricated by Hot-Wire Chemical Vapor Deposition
AuthID
P-004-FV5
4
Author(s)
Patil, SB
·
Adrega, T
·
Chu, V
·
Conde, JP
Document Type
Article
Year published
2006
Published
in
JOURNAL OF MICROMECHANICS AND MICROENGINEERING,
ISSN: 0960-1317
Volume: 16, Issue: 12, Pages: 2730-2735 (6)
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Publication Identifiers
DOI
:
10.1088/0960-1317/16/12/028
Scopus
: 2-s2.0-33846047872
Wos
: WOS:000242475200028
Source Identifiers
ISSN
: 0960-1317
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