Residual Stress Minimum in Nanocrystalline Diamond Films

AuthID
P-004-HW4
Document Type
Article
Year published
2006
Published
in APPLIED PHYSICS LETTERS, ISSN: 0003-6951
Volume: 89, Issue: 9, Pages: 093109 (3)
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Publication Identifiers
Scopus: 2-s2.0-33748255714
Wos: WOS:000240236600099
Source Identifiers
ISSN: 0003-6951
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