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Residual Stress Minimum in Nanocrystalline Diamond Films
AuthID
P-004-HW4
6
Author(s)
Vila, M
·
Amaral, M
·
Oliveira, FJ
·
Silva, RF
·
Fernandes, AJS
·
Soares, MR
Document Type
Article
Year published
2006
Published
in
APPLIED PHYSICS LETTERS,
ISSN: 0003-6951
Volume: 89, Issue: 9, Pages: 093109 (3)
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Wos
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Scopus
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16
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Metadata
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Publication Identifiers
DOI
:
10.1063/1.2339042
Scopus
: 2-s2.0-33748255714
Wos
: WOS:000240236600099
Source Identifiers
ISSN
: 0003-6951
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