Sub-Micron Structuring of Silicon Using Femtosecond Laser Interferometry

AuthID
 P-006-656
6
Author(s)
Document Type
Article
Year published
2013
Published
in OPTICS AND LASER TECHNOLOGY, ISSN: 0030-3992
Volume: 54, Pages: 428-431 (4)
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Scopus®
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Publication Identifiers
Scopus: 2-s2.0-84880882551
Wos: WOS:000323992900064
Source Identifiers
ISSN: 0030-3992
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