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Sub-Micron Structuring of Silicon Using Femtosecond Laser Interferometry

AuthID
P-006-656

Author(s)

Oliveira, V

Tipo de Documento

Article

Year published

2013

Publicado

in OPTICS AND LASER TECHNOLOGY, ISSN: 0030-3992

Volume: 54, Páginas: 428-431 (4)

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Publication Identifiers

DOI: 10.1016/j.optlastec.2013.06.031

SCOPUS: 2-s2.0-84880882551

Wos: WOS:000323992900064

Source Identifiers

ISSN: 0030-3992

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Sub-Micron Structuring of Silicon Using Femtosecond Laser Interferometry

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Sub-Micron Structuring of Silicon Using Femtosecond Laser Interferometry

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