A New Omcvd Iridium Precursor for Thin Film Deposition

AuthID
P-000-W6R
6
Author(s)
Serp, P
·
Feurer, R
·
Kalck, P
·
Document Type
Article
Year published
2001
Published
in CHEMICAL VAPOR DEPOSITION, ISSN: 0948-1907
Volume: 7, Issue: 2, Pages: 59-62 (4)
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Publication Identifiers
Scopus: 2-s2.0-0003072387
Wos: WOS:000167699300001
Source Identifiers
ISSN: 0948-1907
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