High Depth Resolution Rutherford Backscattering Analysis of Si-Si0.78Ge0.22/(0 0 1)Si Superlattices

AuthID
P-009-2V5
5
Author(s)
Mironov, OA
·
Phillips, PJ
·
Parker, EHC
Document Type
Article
Year published
1998
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 139, Issue: 1-4, Pages: 239-243 (5)
Conference
5Th European Conference on Accelerators in Applied Research and Technology (Ecaart5), Date: AUG 26-30, 1997, Location: EINDHOVEN, NETHERLANDS, Host: EINDHOVEN UNIV
Indexing
Publication Identifiers
Scopus: 2-s2.0-0032043003
Wos: WOS:000074586200036
Source Identifiers
ISSN: 0168-583X
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