Excimer Laser-Assisted Cleaning of Single-Crystal Silicon Wafers Contaminated with Metallic Particles

AuthID
 P-000-Y1H
5
Author(s)
Neves, P
·
Arronte, M
·
Document Type
Proceedings Paper
Year published
2001
Published
in 20TH ICALEO 2001, VOLS 92 & 93, CONGRESS PROCEEDINGS
Pages: 1744-1753 (10)
Conference
20Th International Congress on Applications of Lasers and Electro-Optics (Icaleo 2001), Date: OCT 14-18, 2001, Location: JACKSONVILLE, FL, Sponsors: Laser Inst Amer
Indexing
Wos®
Publication Identifiers
Wos: WOS:000177444200192
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

A place for researchers and their institutions

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service