Bi-Directional Extended Range Parallel Plate Electrostatic Actuator Based On Feedback Linearization

AuthID
P-00K-84S
8
Author(s)
Fonseca, H
·
Cabral, J
·
Gaspar, J
·
Document Type
Proceedings Paper
Year published
2015
Published
in 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015) in Proceedings IEEE Micro Electro Mechanical Systems, ISSN: 1084-6999
Pages: 1036-1039 (4)
Conference
28Th Ieee International Conference on Micro Electro Mechanical Systems (Mems), Date: JAN 18-22, 2015, Location: Estoril, PORTUGAL, Sponsors: IEEE, IEEE Robot & Automat Soc
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Publication Identifiers
Wos: WOS:000370382900270
Source Identifiers
ISSN: 1084-6999
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