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Bi-Directional Extended Range Parallel Plate Electrostatic Actuator Based On Feedback Linearization

AuthID
P-00K-84S

Author(s)

Fonseca, H

Cabral, J

Gaspar, J

Rocha, LA

Tipo de Documento

Proceedings Paper

Year published

2015

Publicado

in 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015) in Proceedings IEEE Micro Electro Mechanical Systems, ISSN: 1084-6999

Páginas: 1036-1039 (4)

Conference

28Th Ieee International Conference on Micro Electro Mechanical Systems (Mems), Date: JAN 18-22, 2015, Location: Estoril, PORTUGAL, Patrocinadores: IEEE, IEEE Robot & Automat Soc

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Publication Identifiers

Wos: WOS:000370382900270

Source Identifiers

ISSN: 1084-6999

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Bi-Directional Extended Range Parallel Plate Electrostatic Actuator Based On Feedback Linearization

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Bi-Directional Extended Range Parallel Plate Electrostatic Actuator Based On Feedback Linearization

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