Additional Control of Bombardment by Deep Oscillation Magnetron Sputtering: Effect on the Microstructure and Topography of Cr Thin Films

AuthID
 P-00M-A6J
4
Author(s)
Document Type
Article
Year published
2016
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 619, Pages: 250-260 (11)
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Publication Identifiers
Wos: WOS:000389610900037
Source Identifiers
ISSN: 0040-6090
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