Study of the 300-Mm Cosi2 Defects Induced by Soft Sputter Etch Process Before Cobalt Deposition - Characterization, Design of Experiment and 200/300 Mm Comparison

AuthID
 P-00N-QT5
5
Author(s)
Humbert, A
·
Regnier, C
·
Basso, MT
·
Document Type
Proceedings Paper
Year published
2004
Published
in Materials Science and Engineering B: Solid-State Materials for Advanced Technology, ISSN: 0921-5107
Volume: 114-115, Issue: SPEC. ISS., Pages: 209-213
Indexing
Scopus®
Crossref®2
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-10644219548
Source Identifiers
ISSN: 0921-5107
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