Combined In-Depth X-Ray Photoelectron Spectroscopy and Time-Of-Flight Secondary Ion Mass Spectroscopy Study of the Effect of Deposition Pressure and Substrate Bias on the Electrical Properties and Composition of Ga-Doped Zno Thin Films Grown by Magnetron Sputtering

AuthID
P-00P-NSC
7
Author(s)
Salvador, PB
·
Welle, A
·
Bruns, M
·
Document Type
Article
Year published
2018
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 665, Pages: 184-192 (9)
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Publication Identifiers
Scopus: 2-s2.0-85053757167
Wos: WOS:000447427400028
Source Identifiers
ISSN: 0040-6090
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