L. Economikos
AuthID: R-00J-D44
1
TITLE: Optimizing stressor film deposition sequence in polish rate order for best planarization
AUTHORS: Zhang, JH; Xiao, C; Strane, JW; Venigalla, R; Economikos, L; Hall, L; Chen, J; Stoll, DC; Wallner, J; Zhuang, H; Ferreira, P ; Kleemeier, W; Goldberg, C; Moon, Y; Truong, C; Sudijono, J; Chen, X; Sampson, R;
PUBLISHED: 2012, SOURCE: 2011 MRS Spring Meeting in Materials Research Society Symposium Proceedings, VOLUME: 1335
AUTHORS: Zhang, JH; Xiao, C; Strane, JW; Venigalla, R; Economikos, L; Hall, L; Chen, J; Stoll, DC; Wallner, J; Zhuang, H; Ferreira, P ; Kleemeier, W; Goldberg, C; Moon, Y; Truong, C; Sudijono, J; Chen, X; Sampson, R;
PUBLISHED: 2012, SOURCE: 2011 MRS Spring Meeting in Materials Research Society Symposium Proceedings, VOLUME: 1335
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