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TITLE: Can We Rationally Design and Operate Spatial Atomic Layer Deposition Systems for Steering the Growth Regime of Thin Films?
AUTHORS: Vale, Joao Pedro; Sekkat, Abderrahime; Gheorghin, Thomas; Sevim, Semih; Mavromanolaki, Eirini; Flouris, Andreas D.; Pane, Salvador; Munoz Rojas, David; Puigmarti Luis, Josep; Mayor, Tiago Sotto ;
PUBLISHED: 2023, SOURCE: JOURNAL OF PHYSICAL CHEMISTRY C
INDEXED IN: Scopus WOS