Publicações

Mechanical Spectrum Analyzer in Silicon Using Micromachined Accelerometers with Time-Varying Electrostatic Feedback

AuthID
P-008-PE1

Author(s)

Rocha, LA

Cretu, E

de Graaf, G

Wolffenbuttel, RF

Tipo de Documento

Proceedings Paper

Year published

2003

Publicado

in IMTC/O3: PROCEEDINGS OF THE 20TH IEEE INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE, VOLS 1 AND 2 in IEEE INSTRUMENTATION & MEASUREMENT TECHNOLOGY CONFERENCE, PROCEEDINGS, ISSN: 1091-5281

Páginas: 1197-1201 (5)

Conference

20Th Ieee Instrumentation and Measurement Technology Conference, Date: MAY 20-22, 2003, Location: VAIL, CO, Patrocinadores: IEEE Instrumentat & Measurement Soc

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