Mechanical Spectrum Analyzer in Silicon Using Micromachined Accelerometers with Time-Varying Electrostatic Feedback

AuthID
 P-008-PE1
4
Author(s)
de Graaf, G
·
Document Type
Proceedings Paper
Year published
2003
Published
in IMTC/O3: PROCEEDINGS OF THE 20TH IEEE INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE, VOLS 1 AND 2 in IEEE INSTRUMENTATION & MEASUREMENT TECHNOLOGY CONFERENCE, PROCEEDINGS, ISSN: 1091-5281
Pages: 1197-1201 (5)
Conference
20Th Ieee Instrumentation and Measurement Technology Conference, Date: MAY 20-22, 2003, Location: VAIL, CO, Sponsors: IEEE Instrumentat & Measurement Soc
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Publication Identifiers
Wos: WOS:000183417200229
Source Identifiers
ISSN: 1091-5281
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