Effects of Working Pressure on Physical Properties of Tungsten-Oxide Thin Films Sputtered from Oxide Target

AuthID
P-018-MZK
4
Author(s)
Riech I.
·
Acosta M.
·
Peña J.L.
·
Document Type
Article
Year published
2010
Published
in Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, ISSN: 07342101
Volume: 28, Issue: 2, Pages: 329-333 (4)
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Publication Identifiers
Scopus: 2-s2.0-77949407846
Source Identifiers
ISSN: 07342101
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