Publications

AuthID
P-018-N10

Author(s)

Calderón C.

Gordillo G.

Becerra R.

Document Type

Article

Year published

2015

Published

in Materials Science in Semiconductor Processing, ISSN: 13698001

Volume: 39, Pages: 492-498 (6)

Indexing

Scopus^®

Crossref^®45

Google Scholar^®

Publication Identifiers

DOI: 10.1016/j.mssp.2015.05.064

Scopus: 2-s2.0-84931260541

Source Identifiers

ISSN: 13698001

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