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TITLE: Optoelectronic and structural properties of amorphous silicon-carbon alloys deposited by low-power electron-cyclotron resonance plasma-enhanced chemical-vapor deposition  Full Text
AUTHORS: Conde, JP ; Chu, V ; da Silva, MF; Kling, A ; Dai, Z; Soares, JC ; Arekat, S; Fedorov, A ; Berberan Santos, MN ; Giorgis, F; Pirri, CF;
PUBLISHED: 1999, SOURCE: JOURNAL OF APPLIED PHYSICS, VOLUME: 85, ISSUE: 6
INDEXED IN: Scopus WOS CrossRef
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TITLE: Amorphous and microcrystalline silicon deposited by low-power electron-cyclotron resonance plasma-enhanced chemical-vapor deposition
AUTHORS: Conde, JP ; Schotten, V; Arekat, S; Brogueira, P ; Sousa, R; Chu, V ;
PUBLISHED: 1997, SOURCE: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, VOLUME: 36, ISSUE: 1A
INDEXED IN: Scopus WOS CrossRef
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TITLE: LOW FILAMENT TEMPERATURE DEPOSITION OF A-SI-H BY HOT-WIRE CHEMICAL-VAPOR-DEPOSITION  Full Text
AUTHORS: BROGUEIRA, P ; CONDE, JP ; AREKAT, S; CHU, V ;
PUBLISHED: 1995, SOURCE: JOURNAL OF APPLIED PHYSICS, VOLUME: 78, ISSUE: 6
INDEXED IN: Scopus WOS
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TITLE: Low filament temperature deposition of a-Si:H by hot-wire chemical vapor deposition  Full Text
AUTHORS: Brogueira, P; Conde, JP; Arekat, S; Chu, V;
PUBLISHED: 1995, SOURCE: J. Appl. Phys. - Journal of Applied Physics, VOLUME: 78, ISSUE: 6
INDEXED IN: CrossRef