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TITLE: Influence of nitrogen content on the structural, mechanical and electrical properties of TiN thin films  Full Text
AUTHORS: Vaz, F ; Ferreira, J; Ribeiro, E; Rebouta, L ; Lanceros Mendez, S ; Mendes, JA ; Alves, E ; Goudeau, P; Riviere, JP; Ribeiro, F; Moutinho, I; Pischow, K; de Rijk, J;
PUBLISHED: 2005, SOURCE: SURFACE & COATINGS TECHNOLOGY, VOLUME: 191, ISSUE: 2-3
INDEXED IN: Scopus WOS CrossRef