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TITLE: Reactive sputtering of TiOxNy coatings by the reactive gas pulsing process. Part I: Pattern and period of pulses  Full Text
AUTHORS: Martin, N; Lintymer, J; Gavoille, J; Chappe, JM; Sthal, F; Takadoum, J; Vaz, F ; Rebouta, L ;
PUBLISHED: 2007, SOURCE: SURFACE & COATINGS TECHNOLOGY, VOLUME: 201, ISSUE: 18
INDEXED IN: Scopus WOS CrossRef
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TITLE: Reactive sputtering of TiOxNy coatings by the reactive gas pulsing process: Part III: The particular case of exponential pulses  Full Text
AUTHORS: Martin, N; Lintymer, J; Gavoille, J; Chappe, JM; Sthal, F; Takadoum, J; Vaz, F ; Rebouta, L ;
PUBLISHED: 2007, SOURCE: SURFACE & COATINGS TECHNOLOGY, VOLUME: 201, ISSUE: 18
INDEXED IN: Scopus WOS CrossRef