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TITLE: Permeation barrier performance of Hot Wire-CVD grown silicon-nitride films treated by argon plasma  Full Text
AUTHORS: Majee, S; Cerqueira, MF ; Tondelier, D; Vanel, JC; Geffroy, B; Bonnassieux, Y; Alpuim, P ; Bouree, JE;
PUBLISHED: 2015, SOURCE: THIN SOLID FILMS, VOLUME: 575
INDEXED IN: Scopus WOS CrossRef
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TITLE: Influence of low energy argon plasma treatment on the moisture barrier performance of hot wire-CVD grown SiNx multilayers
AUTHORS: Subimal Majee; Maria Fatima Cerqueira ; Denis Tondelier; Bernard Geffroy; Yvan Bonnassieux; Pedro Alpuim ; Jean Eric Bouree;
PUBLISHED: 2014, SOURCE: JAPANESE JOURNAL OF APPLIED PHYSICS, VOLUME: 53, ISSUE: 5
INDEXED IN: Scopus WOS CrossRef