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TITLE: On-chip magnetoresistive detection of resonance in microcantilevers  Full Text
AUTHORS: Patil, SB; Guedes, A; Freitas, PP ; Cardoso, S ; Chu, V ; Conde, JP ;
PUBLISHED: 2009, SOURCE: APPLIED PHYSICS LETTERS, VOLUME: 95, ISSUE: 2
INDEXED IN: Scopus WOS CrossRef
2
TITLE: Comparison of the mechanical and resonance properties of thin film silicon MEMS fabricated at 110 and 250 degrees C  Full Text
AUTHORS: Samadhan B Patil; Chu, V ; Conde, JP ;
PUBLISHED: 2009, SOURCE: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, VOLUME: 19, ISSUE: 2
INDEXED IN: Scopus WOS CrossRef
3
TITLE: Mass Sensing using an Amorphous Silicon MEMS resonator
AUTHORS: Patil, SB; Chu, V ; Conde, JP ;
PUBLISHED: 2009, SOURCE: 23rd Eurosensors Conference in PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, VOLUME: 1, ISSUE: 1
INDEXED IN: Scopus WOS CrossRef
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TITLE: Hybrid Magnetic Tunnel Junction-MEMS High Frequency Field Modulator for 1/f Noise Suppression
AUTHORS: Andre Guedes; Samadhan B Patil; Piotr Wisniowski; Virginia Chu ; Joao P Conde ; Paulo P Freitas ;
PUBLISHED: 2008, SOURCE: IEEE International Magnetics Conference (INTERMAG) in IEEE TRANSACTIONS ON MAGNETICS, VOLUME: 44, ISSUE: 11
INDEXED IN: Scopus WOS CrossRef
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TITLE: Hybrid magnetoresistive/microelectromechanical devices for static field modulation and sensor 1/f noise cancellation  Full Text
AUTHORS: Guedes, A; Patil, SB; Cardoso, S ; Chu, V ; Conde, JP ; Freitas, PP ;
PUBLISHED: 2008, SOURCE: 52nd Annual Conference on Magnetism and Magnetic Materials in JOURNAL OF APPLIED PHYSICS, VOLUME: 103, ISSUE: 7
INDEXED IN: Scopus WOS CrossRef
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TITLE: Hybrid magnetic tunnel junction-MEMS high frequency field modulator for 1/f noise suppression
AUTHORS: Guedes, A; Patil, SB; Wisniowski, P; Chu, V; Conde, JP; Freitas, PP;
PUBLISHED: 2008, SOURCE: IEEE Transactions on Magnetics, VOLUME: 44, ISSUE: 11 PART 2
INDEXED IN: Scopus
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TITLE: Surface micromachining of a thin film microresonator using dry decomposition of a polymer sacrificial layer
AUTHORS: Patil, SB; Chu, V ; Conde, JP ;
PUBLISHED: 2007, SOURCE: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, VOLUME: 25, ISSUE: 2
INDEXED IN: Scopus WOS CrossRef
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TITLE: Performance of thin film silicon MEMS on flexible plastic substrates
AUTHORS: Samadhan Patil; Virginia Chu ; Joao Pedro Conde ;
PUBLISHED: 2007, SOURCE: Symposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology held at the 2007 MRS Spring Meeting in AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY 2007, VOLUME: 989
INDEXED IN: Scopus WOS
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TITLE: Thin film silicon MEMS microresonators fabricated by hot-wire chemical vapor deposition  Full Text
AUTHORS: Samadhan B Patil; Adrega, T; Chu, V ; Conde, JP ;
PUBLISHED: 2006, SOURCE: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, VOLUME: 16, ISSUE: 12
INDEXED IN: Scopus WOS CrossRef
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TITLE: Micromechanical properties of amorphous, nanocrystalline and transition phase hot-wire thin-silicon MEMS  Full Text
AUTHORS: Samadhan B Patil; Teresa Adrega; Alexandra Pimentel; Chu, V ; Conde, JP ;
PUBLISHED: 2006, SOURCE: 21st International Conference on Amorphous and Nanocrystalline Semiconductors in JOURNAL OF NON-CRYSTALLINE SOLIDS, VOLUME: 352, ISSUE: 9-20
INDEXED IN: Scopus WOS CrossRef